They are applied to a sintered silicon nitride substrate.
Product Number: BN-HS /BN-HQ /BN-HC
Color: White
Purity: ≥99.7% /99.3% /99%
Density: 1.3-1.4 / 1.5-1.6 / 1.9-2.0
As boron nitride is a machinable ceramic material, we can craft it to your specifications within approximately 2 weeks based on the provided drawings. Please click ‘inquiry’ to send us a message and, if needed, email a drawing.
Boron Nitride (BN) setter plate is a ceramic component designed for high-temperature industrial processes, particularly in semiconductor and electronics manufacturing. It plays a critical role in maintaining product purity, dimensional stability, and electrical insulation in high-temperature environments. With its ability to withstand high temperatures, resist chemical reactions, and provide electrical isolation, the Boron Nitride (BN) setter plate is indispensable in industries where precision and purity are essential.
|
Grade |
BN-HS |
BN-HQ |
BN-HC |
|
|
Purity (%) |
BN＞99.7％ |
BN＞99.3％ |
BN＞99％ |
|
|
Color |
White |
White |
White |
|
|
Density (g/cm3) |
1.3-1.4 |
1.5-1.6 |
1.9-2.0 |
|
|
Oxygen content （％） |
≦0.1 |
≦0.1 |
≦0.35 |
|
|
Volume resistivity （Ω・cm） |
>1014 |
>1014 |
>1014 |
|
|
Operating temp |
Air |
≦900 |
≦900 |
≦900 |
|
Inert gas |
≦2100 |
≦2100 |
≦2100 |
|
|
Vacuum |
≦1900 |
≦1900 |
≦1900 |
|
|
Bending strength （MPa) |
18 |
30 |
40 |
|
|
Coefficient of thermal expansion （10-6/℃） |
-0.4 |
-0.4 |
1.5 |
|
|
Thermal conductivity （W/m･K） |
60 |
50 |
35 |
|
