At present, the processing method of aluminum nitride ceramic substrate is mainly polishing and grinding, supplemented by other ultra-precision processing methods to ensure the high integrity of the finished substrate. In order to obtain aluminum nitride ceramic substrate with high surface quality, chemical mechanical polishing, magnetorheological polishing, ELID grinding, laser processing, plasma assisted polishing and composite polishing are mainly used.

So, what is chemical mechanical polishing, electrolytic internal dressing ELID grinding process, laser processing, as well as magnetorheological polishing process, plasma assisted polishing process, and composite polishing process?

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